1/4/2013	8:57:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/4/2013	8:57:11 AM	Recipe started at 8:57 AM
1/4/2013	8:57:11 AM	Helium valve closed
1/4/2013	8:57:11 AM	H2 valve closed
1/4/2013	8:57:11 AM	BCl3 valve closed
1/4/2013	8:57:11 AM	PH3 valve closed
1/4/2013	8:57:11 AM	SiCl4 pre valve closed
1/4/2013	8:57:11 AM	SiCl4 post valve closed
1/4/2013	8:57:11 AM	Main Vac valve closed
1/4/2013	8:57:11 AM	Bypass valve closed
1/4/2013	8:57:11 AM	Bubbler valve closed
1/4/2013	8:57:11 AM	Helium MFC set to  0.000000
1/4/2013	8:57:11 AM	H2 MFC set to  0.000000
1/4/2013	8:57:11 AM	BCl3 MFC set to  0.000000
1/4/2013	8:57:11 AM	PH3 MFC set to  0.000000
1/4/2013	8:57:11 AM	SiCl4 MFC set to  0.000000
1/4/2013	8:57:11 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	8:57:11 AM	Tube furnace set to 0
1/4/2013	8:57:14 AM	H2 valve closed
1/4/2013	8:57:14 AM	BCl3 valve closed
1/4/2013	8:57:14 AM	PH3 valve closed
1/4/2013	8:57:14 AM	SiCl4 pre valve closed
1/4/2013	8:57:14 AM	SiCl4 post valve closed
1/4/2013	8:57:14 AM	Main Vac valve closed
1/4/2013	8:57:14 AM	Bypass valve closed
1/4/2013	8:57:14 AM	Bubbler valve closed
1/4/2013	8:57:14 AM	Helium valve opened
1/4/2013	8:57:14 AM	Helium MFC set to  500.000000
1/4/2013	8:57:14 AM	H2 MFC set to  0.000000
1/4/2013	8:57:14 AM	BCl3 MFC set to  0.000000
1/4/2013	8:57:14 AM	PH3 MFC set to  0.000000
1/4/2013	8:57:14 AM	SiCl4 MFC set to  0.000000
1/4/2013	8:57:14 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	8:57:14 AM	Tube furnace set to 0
1/4/2013	8:58:28 AM	Helium valve closed
1/4/2013	8:58:28 AM	H2 valve closed
1/4/2013	8:58:28 AM	BCl3 valve closed
1/4/2013	8:58:28 AM	PH3 valve closed
1/4/2013	8:58:28 AM	SiCl4 pre valve closed
1/4/2013	8:58:28 AM	SiCl4 post valve closed
1/4/2013	8:58:28 AM	Main Vac valve closed
1/4/2013	8:58:28 AM	Bypass valve closed
1/4/2013	8:58:28 AM	Bubbler valve closed
1/4/2013	8:58:28 AM	Helium MFC set to  0.000000
1/4/2013	8:58:28 AM	H2 MFC set to  0.000000
1/4/2013	8:58:28 AM	BCl3 MFC set to  0.000000
1/4/2013	8:58:28 AM	PH3 MFC set to  0.000000
1/4/2013	8:58:28 AM	SiCl4 MFC set to  0.000000
1/4/2013	8:58:28 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	8:58:28 AM	Tube furnace set to 0
1/4/2013	8:58:29 AM	Run finished at 8:58 AM
1/4/2013	8:58:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/4/2013	9:00:13 AM	Tube furnace set to 150
1/4/2013	9:07:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2013	9:07:07 AM	Recipe started at 9:07 AM
1/4/2013	9:07:07 AM	Helium valve closed
1/4/2013	9:07:07 AM	H2 valve closed
1/4/2013	9:07:07 AM	BCl3 valve closed
1/4/2013	9:07:07 AM	PH3 valve closed
1/4/2013	9:07:07 AM	SiCl4 pre valve closed
1/4/2013	9:07:07 AM	SiCl4 post valve closed
1/4/2013	9:07:07 AM	Main Vac valve closed
1/4/2013	9:07:07 AM	Bubbler valve closed
1/4/2013	9:07:07 AM	Bypass valve opened
1/4/2013	9:07:07 AM	Helium MFC set to  0.000000
1/4/2013	9:07:07 AM	H2 MFC set to  0.000000
1/4/2013	9:07:07 AM	BCl3 MFC set to  0.000000
1/4/2013	9:07:07 AM	PH3 MFC set to  0.000000
1/4/2013	9:07:07 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:07:07 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:07:07 AM	Tube furnace set to 0
1/4/2013	9:08:22 AM	Helium valve closed
1/4/2013	9:08:22 AM	H2 valve closed
1/4/2013	9:08:22 AM	BCl3 valve closed
1/4/2013	9:08:22 AM	PH3 valve closed
1/4/2013	9:08:22 AM	SiCl4 pre valve closed
1/4/2013	9:08:22 AM	SiCl4 post valve closed
1/4/2013	9:08:22 AM	Main Vac valve closed
1/4/2013	9:08:22 AM	Bubbler valve closed
1/4/2013	9:08:22 AM	Bypass valve opened
1/4/2013	9:08:22 AM	Helium MFC set to  0.000000
1/4/2013	9:08:22 AM	H2 MFC set to  0.000000
1/4/2013	9:08:22 AM	BCl3 MFC set to  0.000000
1/4/2013	9:08:22 AM	PH3 MFC set to  0.000000
1/4/2013	9:08:22 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:08:22 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:08:22 AM	Tube furnace set to 0
1/4/2013	9:09:14 AM	Helium valve closed
1/4/2013	9:09:14 AM	H2 valve closed
1/4/2013	9:09:14 AM	BCl3 valve closed
1/4/2013	9:09:14 AM	PH3 valve closed
1/4/2013	9:09:14 AM	SiCl4 pre valve closed
1/4/2013	9:09:14 AM	SiCl4 post valve closed
1/4/2013	9:09:14 AM	Bypass valve closed
1/4/2013	9:09:14 AM	Bubbler valve closed
1/4/2013	9:09:14 AM	Main Vac valve opened
1/4/2013	9:09:14 AM	Helium MFC set to  0.000000
1/4/2013	9:09:14 AM	H2 MFC set to  0.000000
1/4/2013	9:09:14 AM	BCl3 MFC set to  0.000000
1/4/2013	9:09:14 AM	PH3 MFC set to  0.000000
1/4/2013	9:09:14 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:09:14 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:09:15 AM	Tube furnace set to 0
1/4/2013	9:09:16 AM	Run finished at 9:09 AM
1/4/2013	9:09:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/4/2013	9:19:00 AM	Recipe started at 9:18 AM
1/4/2013	9:19:00 AM	Helium valve closed
1/4/2013	9:19:00 AM	H2 valve closed
1/4/2013	9:19:00 AM	BCl3 valve closed
1/4/2013	9:19:00 AM	PH3 valve closed
1/4/2013	9:19:00 AM	SiCl4 pre valve closed
1/4/2013	9:19:00 AM	SiCl4 post valve closed
1/4/2013	9:19:00 AM	Bypass valve closed
1/4/2013	9:19:00 AM	Bubbler valve closed
1/4/2013	9:19:00 AM	Main Vac valve opened
1/4/2013	9:19:00 AM	Helium MFC set to  0.000000
1/4/2013	9:19:00 AM	H2 MFC set to  0.000000
1/4/2013	9:19:00 AM	BCl3 MFC set to  0.000000
1/4/2013	9:19:00 AM	PH3 MFC set to  0.000000
1/4/2013	9:19:00 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:19:00 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:19:01 AM	Tube furnace set to 150
1/4/2013	9:19:31 AM	H2 valve closed
1/4/2013	9:19:31 AM	BCl3 valve closed
1/4/2013	9:19:31 AM	PH3 valve closed
1/4/2013	9:19:31 AM	SiCl4 pre valve closed
1/4/2013	9:19:31 AM	SiCl4 post valve closed
1/4/2013	9:19:31 AM	Bypass valve closed
1/4/2013	9:19:31 AM	Bubbler valve closed
1/4/2013	9:19:31 AM	Helium valve opened
1/4/2013	9:19:31 AM	Main Vac valve opened
1/4/2013	9:19:31 AM	Helium MFC set to  20.000000
1/4/2013	9:19:31 AM	H2 MFC set to  0.000000
1/4/2013	9:19:31 AM	BCl3 MFC set to  0.000000
1/4/2013	9:19:31 AM	PH3 MFC set to  0.000000
1/4/2013	9:19:31 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:19:31 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:19:31 AM	Tube furnace set to 150
1/4/2013	9:20:01 AM	Helium valve closed
1/4/2013	9:20:01 AM	H2 valve closed
1/4/2013	9:20:01 AM	BCl3 valve closed
1/4/2013	9:20:01 AM	PH3 valve closed
1/4/2013	9:20:01 AM	SiCl4 pre valve closed
1/4/2013	9:20:01 AM	SiCl4 post valve closed
1/4/2013	9:20:01 AM	Bypass valve closed
1/4/2013	9:20:01 AM	Bubbler valve closed
1/4/2013	9:20:01 AM	Main Vac valve opened
1/4/2013	9:20:01 AM	Helium MFC set to  0.000000
1/4/2013	9:20:01 AM	H2 MFC set to  0.000000
1/4/2013	9:20:01 AM	BCl3 MFC set to  0.000000
1/4/2013	9:20:01 AM	PH3 MFC set to  0.000000
1/4/2013	9:20:01 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:20:01 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:20:01 AM	Tube furnace set to 150
1/4/2013	9:20:31 AM	H2 valve closed
1/4/2013	9:20:31 AM	BCl3 valve closed
1/4/2013	9:20:31 AM	PH3 valve closed
1/4/2013	9:20:31 AM	SiCl4 pre valve closed
1/4/2013	9:20:31 AM	SiCl4 post valve closed
1/4/2013	9:20:31 AM	Bypass valve closed
1/4/2013	9:20:31 AM	Bubbler valve closed
1/4/2013	9:20:31 AM	Helium valve opened
1/4/2013	9:20:31 AM	Main Vac valve opened
1/4/2013	9:20:31 AM	Helium MFC set to  20.000000
1/4/2013	9:20:31 AM	H2 MFC set to  0.000000
1/4/2013	9:20:31 AM	BCl3 MFC set to  0.000000
1/4/2013	9:20:31 AM	PH3 MFC set to  0.000000
1/4/2013	9:20:31 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:20:31 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:20:31 AM	Tube furnace set to 150
1/4/2013	9:21:01 AM	Helium valve closed
1/4/2013	9:21:01 AM	H2 valve closed
1/4/2013	9:21:01 AM	BCl3 valve closed
1/4/2013	9:21:01 AM	PH3 valve closed
1/4/2013	9:21:01 AM	SiCl4 pre valve closed
1/4/2013	9:21:01 AM	SiCl4 post valve closed
1/4/2013	9:21:01 AM	Bypass valve closed
1/4/2013	9:21:01 AM	Bubbler valve closed
1/4/2013	9:21:01 AM	Main Vac valve opened
1/4/2013	9:21:01 AM	Helium MFC set to  0.000000
1/4/2013	9:21:01 AM	H2 MFC set to  0.000000
1/4/2013	9:21:01 AM	BCl3 MFC set to  0.000000
1/4/2013	9:21:01 AM	PH3 MFC set to  0.000000
1/4/2013	9:21:01 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:21:01 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:21:02 AM	Tube furnace set to 150
1/4/2013	9:21:32 AM	H2 valve closed
1/4/2013	9:21:32 AM	BCl3 valve closed
1/4/2013	9:21:32 AM	PH3 valve closed
1/4/2013	9:21:32 AM	SiCl4 pre valve closed
1/4/2013	9:21:32 AM	SiCl4 post valve closed
1/4/2013	9:21:32 AM	Bypass valve closed
1/4/2013	9:21:32 AM	Bubbler valve closed
1/4/2013	9:21:32 AM	Helium valve opened
1/4/2013	9:21:32 AM	Main Vac valve opened
1/4/2013	9:21:32 AM	Helium MFC set to  20.000000
1/4/2013	9:21:32 AM	H2 MFC set to  0.000000
1/4/2013	9:21:32 AM	BCl3 MFC set to  0.000000
1/4/2013	9:21:32 AM	PH3 MFC set to  0.000000
1/4/2013	9:21:32 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:21:32 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:21:32 AM	Tube furnace set to 150
1/4/2013	9:22:02 AM	Helium valve closed
1/4/2013	9:22:02 AM	H2 valve closed
1/4/2013	9:22:02 AM	BCl3 valve closed
1/4/2013	9:22:02 AM	PH3 valve closed
1/4/2013	9:22:02 AM	SiCl4 pre valve closed
1/4/2013	9:22:02 AM	SiCl4 post valve closed
1/4/2013	9:22:02 AM	Bypass valve closed
1/4/2013	9:22:02 AM	Bubbler valve closed
1/4/2013	9:22:02 AM	Main Vac valve opened
1/4/2013	9:22:02 AM	Helium MFC set to  0.000000
1/4/2013	9:22:02 AM	H2 MFC set to  0.000000
1/4/2013	9:22:02 AM	BCl3 MFC set to  0.000000
1/4/2013	9:22:02 AM	PH3 MFC set to  0.000000
1/4/2013	9:22:02 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:22:02 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:22:02 AM	Tube furnace set to 150
1/4/2013	9:22:32 AM	H2 valve closed
1/4/2013	9:22:32 AM	BCl3 valve closed
1/4/2013	9:22:32 AM	PH3 valve closed
1/4/2013	9:22:32 AM	SiCl4 pre valve closed
1/4/2013	9:22:32 AM	SiCl4 post valve closed
1/4/2013	9:22:32 AM	Bypass valve closed
1/4/2013	9:22:32 AM	Bubbler valve closed
1/4/2013	9:22:32 AM	Helium valve opened
1/4/2013	9:22:32 AM	Main Vac valve opened
1/4/2013	9:22:32 AM	Helium MFC set to  20.000000
1/4/2013	9:22:32 AM	H2 MFC set to  0.000000
1/4/2013	9:22:32 AM	BCl3 MFC set to  0.000000
1/4/2013	9:22:32 AM	PH3 MFC set to  0.000000
1/4/2013	9:22:32 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:22:32 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:22:32 AM	Tube furnace set to 150
1/4/2013	9:23:02 AM	Helium valve closed
1/4/2013	9:23:02 AM	H2 valve closed
1/4/2013	9:23:02 AM	BCl3 valve closed
1/4/2013	9:23:02 AM	PH3 valve closed
1/4/2013	9:23:02 AM	SiCl4 pre valve closed
1/4/2013	9:23:02 AM	SiCl4 post valve closed
1/4/2013	9:23:02 AM	Bypass valve closed
1/4/2013	9:23:02 AM	Bubbler valve closed
1/4/2013	9:23:02 AM	Main Vac valve opened
1/4/2013	9:23:02 AM	Helium MFC set to  0.000000
1/4/2013	9:23:02 AM	H2 MFC set to  0.000000
1/4/2013	9:23:02 AM	BCl3 MFC set to  0.000000
1/4/2013	9:23:02 AM	PH3 MFC set to  0.000000
1/4/2013	9:23:02 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:23:02 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:23:03 AM	Tube furnace set to 150
1/4/2013	9:23:33 AM	H2 valve closed
1/4/2013	9:23:33 AM	BCl3 valve closed
1/4/2013	9:23:33 AM	PH3 valve closed
1/4/2013	9:23:33 AM	SiCl4 pre valve closed
1/4/2013	9:23:33 AM	SiCl4 post valve closed
1/4/2013	9:23:33 AM	Bypass valve closed
1/4/2013	9:23:33 AM	Bubbler valve closed
1/4/2013	9:23:33 AM	Helium valve opened
1/4/2013	9:23:33 AM	Main Vac valve opened
1/4/2013	9:23:33 AM	Helium MFC set to  20.000000
1/4/2013	9:23:33 AM	H2 MFC set to  0.000000
1/4/2013	9:23:33 AM	BCl3 MFC set to  0.000000
1/4/2013	9:23:33 AM	PH3 MFC set to  0.000000
1/4/2013	9:23:33 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:23:33 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:23:33 AM	Tube furnace set to 150
1/4/2013	9:24:03 AM	Helium valve closed
1/4/2013	9:24:03 AM	H2 valve closed
1/4/2013	9:24:03 AM	BCl3 valve closed
1/4/2013	9:24:03 AM	PH3 valve closed
1/4/2013	9:24:03 AM	SiCl4 pre valve closed
1/4/2013	9:24:03 AM	SiCl4 post valve closed
1/4/2013	9:24:03 AM	Bypass valve closed
1/4/2013	9:24:03 AM	Bubbler valve closed
1/4/2013	9:24:03 AM	Main Vac valve opened
1/4/2013	9:24:03 AM	Helium MFC set to  0.000000
1/4/2013	9:24:03 AM	H2 MFC set to  0.000000
1/4/2013	9:24:03 AM	BCl3 MFC set to  0.000000
1/4/2013	9:24:03 AM	PH3 MFC set to  0.000000
1/4/2013	9:24:03 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:24:03 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:24:03 AM	Tube furnace set to 150
1/4/2013	9:24:33 AM	H2 valve closed
1/4/2013	9:24:33 AM	BCl3 valve closed
1/4/2013	9:24:33 AM	PH3 valve closed
1/4/2013	9:24:33 AM	SiCl4 pre valve closed
1/4/2013	9:24:33 AM	SiCl4 post valve closed
1/4/2013	9:24:33 AM	Bypass valve closed
1/4/2013	9:24:33 AM	Bubbler valve closed
1/4/2013	9:24:33 AM	Helium valve opened
1/4/2013	9:24:33 AM	Main Vac valve opened
1/4/2013	9:24:33 AM	Helium MFC set to  20.000000
1/4/2013	9:24:33 AM	H2 MFC set to  0.000000
1/4/2013	9:24:33 AM	BCl3 MFC set to  0.000000
1/4/2013	9:24:33 AM	PH3 MFC set to  0.000000
1/4/2013	9:24:33 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:24:33 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:24:33 AM	Tube furnace set to 150
1/4/2013	9:25:03 AM	Helium valve closed
1/4/2013	9:25:03 AM	H2 valve closed
1/4/2013	9:25:03 AM	BCl3 valve closed
1/4/2013	9:25:03 AM	PH3 valve closed
1/4/2013	9:25:03 AM	SiCl4 pre valve closed
1/4/2013	9:25:03 AM	SiCl4 post valve closed
1/4/2013	9:25:03 AM	Bypass valve closed
1/4/2013	9:25:03 AM	Bubbler valve closed
1/4/2013	9:25:03 AM	Main Vac valve opened
1/4/2013	9:25:03 AM	Helium MFC set to  0.000000
1/4/2013	9:25:03 AM	H2 MFC set to  0.000000
1/4/2013	9:25:03 AM	BCl3 MFC set to  0.000000
1/4/2013	9:25:03 AM	PH3 MFC set to  0.000000
1/4/2013	9:25:03 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:25:03 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:25:04 AM	Tube furnace set to 150
1/4/2013	9:25:34 AM	H2 valve closed
1/4/2013	9:25:34 AM	BCl3 valve closed
1/4/2013	9:25:34 AM	PH3 valve closed
1/4/2013	9:25:34 AM	SiCl4 pre valve closed
1/4/2013	9:25:34 AM	SiCl4 post valve closed
1/4/2013	9:25:34 AM	Bypass valve closed
1/4/2013	9:25:34 AM	Bubbler valve closed
1/4/2013	9:25:34 AM	Helium valve opened
1/4/2013	9:25:34 AM	Main Vac valve opened
1/4/2013	9:25:34 AM	Helium MFC set to  20.000000
1/4/2013	9:25:34 AM	H2 MFC set to  0.000000
1/4/2013	9:25:34 AM	BCl3 MFC set to  0.000000
1/4/2013	9:25:34 AM	PH3 MFC set to  0.000000
1/4/2013	9:25:34 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:25:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:25:34 AM	Tube furnace set to 150
1/4/2013	9:26:04 AM	Helium valve closed
1/4/2013	9:26:04 AM	H2 valve closed
1/4/2013	9:26:04 AM	BCl3 valve closed
1/4/2013	9:26:04 AM	PH3 valve closed
1/4/2013	9:26:04 AM	SiCl4 pre valve closed
1/4/2013	9:26:04 AM	SiCl4 post valve closed
1/4/2013	9:26:04 AM	Bypass valve closed
1/4/2013	9:26:04 AM	Bubbler valve closed
1/4/2013	9:26:04 AM	Main Vac valve opened
1/4/2013	9:26:04 AM	Helium MFC set to  0.000000
1/4/2013	9:26:04 AM	H2 MFC set to  0.000000
1/4/2013	9:26:04 AM	BCl3 MFC set to  0.000000
1/4/2013	9:26:04 AM	PH3 MFC set to  0.000000
1/4/2013	9:26:04 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:26:04 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:26:04 AM	Tube furnace set to 150
1/4/2013	9:26:34 AM	H2 valve closed
1/4/2013	9:26:34 AM	BCl3 valve closed
1/4/2013	9:26:34 AM	PH3 valve closed
1/4/2013	9:26:34 AM	SiCl4 pre valve closed
1/4/2013	9:26:34 AM	SiCl4 post valve closed
1/4/2013	9:26:34 AM	Bypass valve closed
1/4/2013	9:26:34 AM	Bubbler valve closed
1/4/2013	9:26:34 AM	Helium valve opened
1/4/2013	9:26:34 AM	Main Vac valve opened
1/4/2013	9:26:34 AM	Helium MFC set to  20.000000
1/4/2013	9:26:34 AM	H2 MFC set to  0.000000
1/4/2013	9:26:34 AM	BCl3 MFC set to  0.000000
1/4/2013	9:26:34 AM	PH3 MFC set to  0.000000
1/4/2013	9:26:34 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:26:34 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:26:34 AM	Tube furnace set to 150
1/4/2013	9:27:04 AM	Helium valve closed
1/4/2013	9:27:04 AM	H2 valve closed
1/4/2013	9:27:04 AM	BCl3 valve closed
1/4/2013	9:27:04 AM	PH3 valve closed
1/4/2013	9:27:04 AM	SiCl4 pre valve closed
1/4/2013	9:27:04 AM	SiCl4 post valve closed
1/4/2013	9:27:04 AM	Bypass valve closed
1/4/2013	9:27:04 AM	Bubbler valve closed
1/4/2013	9:27:04 AM	Main Vac valve opened
1/4/2013	9:27:04 AM	Helium MFC set to  0.000000
1/4/2013	9:27:04 AM	H2 MFC set to  0.000000
1/4/2013	9:27:04 AM	BCl3 MFC set to  0.000000
1/4/2013	9:27:04 AM	PH3 MFC set to  0.000000
1/4/2013	9:27:04 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:27:04 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:27:05 AM	Tube furnace set to 150
1/4/2013	9:27:35 AM	H2 valve closed
1/4/2013	9:27:35 AM	BCl3 valve closed
1/4/2013	9:27:35 AM	PH3 valve closed
1/4/2013	9:27:35 AM	SiCl4 pre valve closed
1/4/2013	9:27:35 AM	SiCl4 post valve closed
1/4/2013	9:27:35 AM	Bypass valve closed
1/4/2013	9:27:35 AM	Bubbler valve closed
1/4/2013	9:27:35 AM	Helium valve opened
1/4/2013	9:27:35 AM	Main Vac valve opened
1/4/2013	9:27:35 AM	Helium MFC set to  20.000000
1/4/2013	9:27:35 AM	H2 MFC set to  0.000000
1/4/2013	9:27:35 AM	BCl3 MFC set to  0.000000
1/4/2013	9:27:35 AM	PH3 MFC set to  0.000000
1/4/2013	9:27:35 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:27:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:27:35 AM	Tube furnace set to 150
1/4/2013	9:28:05 AM	Helium valve closed
1/4/2013	9:28:05 AM	H2 valve closed
1/4/2013	9:28:05 AM	BCl3 valve closed
1/4/2013	9:28:05 AM	PH3 valve closed
1/4/2013	9:28:05 AM	SiCl4 pre valve closed
1/4/2013	9:28:05 AM	SiCl4 post valve closed
1/4/2013	9:28:05 AM	Bypass valve closed
1/4/2013	9:28:05 AM	Bubbler valve closed
1/4/2013	9:28:05 AM	Main Vac valve opened
1/4/2013	9:28:05 AM	Helium MFC set to  0.000000
1/4/2013	9:28:05 AM	H2 MFC set to  0.000000
1/4/2013	9:28:05 AM	BCl3 MFC set to  0.000000
1/4/2013	9:28:05 AM	PH3 MFC set to  0.000000
1/4/2013	9:28:05 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:28:05 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:28:05 AM	Tube furnace set to 150
1/4/2013	9:28:35 AM	H2 valve closed
1/4/2013	9:28:35 AM	BCl3 valve closed
1/4/2013	9:28:35 AM	PH3 valve closed
1/4/2013	9:28:35 AM	SiCl4 pre valve closed
1/4/2013	9:28:35 AM	SiCl4 post valve closed
1/4/2013	9:28:35 AM	Bypass valve closed
1/4/2013	9:28:35 AM	Bubbler valve closed
1/4/2013	9:28:35 AM	Helium valve opened
1/4/2013	9:28:35 AM	Main Vac valve opened
1/4/2013	9:28:35 AM	Helium MFC set to  20.000000
1/4/2013	9:28:35 AM	H2 MFC set to  0.000000
1/4/2013	9:28:35 AM	BCl3 MFC set to  0.000000
1/4/2013	9:28:35 AM	PH3 MFC set to  0.000000
1/4/2013	9:28:35 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:28:35 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:28:35 AM	Tube furnace set to 150
1/4/2013	9:29:05 AM	Helium valve closed
1/4/2013	9:29:05 AM	H2 valve closed
1/4/2013	9:29:05 AM	BCl3 valve closed
1/4/2013	9:29:05 AM	PH3 valve closed
1/4/2013	9:29:05 AM	SiCl4 pre valve closed
1/4/2013	9:29:05 AM	SiCl4 post valve closed
1/4/2013	9:29:05 AM	Bypass valve closed
1/4/2013	9:29:05 AM	Bubbler valve closed
1/4/2013	9:29:05 AM	Main Vac valve opened
1/4/2013	9:29:05 AM	Helium MFC set to  0.000000
1/4/2013	9:29:05 AM	H2 MFC set to  0.000000
1/4/2013	9:29:05 AM	BCl3 MFC set to  0.000000
1/4/2013	9:29:05 AM	PH3 MFC set to  0.000000
1/4/2013	9:29:05 AM	SiCl4 MFC set to  0.000000
1/4/2013	9:29:05 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	9:29:06 AM	Tube furnace set to 150
1/4/2013	9:29:07 AM	Run finished at 9:29 AM
1/4/2013	11:34:30 AM	Main Vac valve closed
1/4/2013	11:34:46 AM	Main Vac valve opened
1/4/2013	11:35:15 AM	Recipe started at 11:35 AM
1/4/2013	11:35:15 AM	Helium valve closed
1/4/2013	11:35:15 AM	H2 valve closed
1/4/2013	11:35:15 AM	BCl3 valve closed
1/4/2013	11:35:15 AM	PH3 valve closed
1/4/2013	11:35:15 AM	SiCl4 pre valve closed
1/4/2013	11:35:15 AM	SiCl4 post valve closed
1/4/2013	11:35:15 AM	Main Vac valve closed
1/4/2013	11:35:15 AM	Bypass valve closed
1/4/2013	11:35:15 AM	Bubbler valve closed
1/4/2013	11:35:15 AM	Helium MFC set to  0.000000
1/4/2013	11:35:15 AM	H2 MFC set to  0.000000
1/4/2013	11:35:15 AM	BCl3 MFC set to  0.000000
1/4/2013	11:35:15 AM	PH3 MFC set to  0.000000
1/4/2013	11:35:15 AM	SiCl4 MFC set to  0.000000
1/4/2013	11:35:15 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	11:35:15 AM	Tube furnace set to 0
1/4/2013	11:35:18 AM	Helium valve closed
1/4/2013	11:35:18 AM	BCl3 valve closed
1/4/2013	11:35:18 AM	PH3 valve closed
1/4/2013	11:35:18 AM	SiCl4 pre valve closed
1/4/2013	11:35:18 AM	SiCl4 post valve closed
1/4/2013	11:35:18 AM	Main Vac valve closed
1/4/2013	11:35:18 AM	Bypass valve closed
1/4/2013	11:35:18 AM	Bubbler valve closed
1/4/2013	11:35:18 AM	H2 valve opened
1/4/2013	11:35:18 AM	Helium MFC set to  0.000000
1/4/2013	11:35:18 AM	H2 MFC set to  500.000000
1/4/2013	11:35:18 AM	BCl3 MFC set to  0.000000
1/4/2013	11:35:18 AM	PH3 MFC set to  0.000000
1/4/2013	11:35:18 AM	SiCl4 MFC set to  0.000000
1/4/2013	11:35:18 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	11:35:18 AM	Tube furnace set to 0
1/4/2013	11:36:30 AM	Helium valve closed
1/4/2013	11:36:30 AM	BCl3 valve closed
1/4/2013	11:36:30 AM	PH3 valve closed
1/4/2013	11:36:30 AM	SiCl4 pre valve closed
1/4/2013	11:36:30 AM	SiCl4 post valve closed
1/4/2013	11:36:30 AM	Main Vac valve closed
1/4/2013	11:36:30 AM	Bypass valve closed
1/4/2013	11:36:30 AM	H2 valve opened
1/4/2013	11:36:30 AM	Bubbler valve opened
1/4/2013	11:36:30 AM	Helium MFC set to  0.000000
1/4/2013	11:36:30 AM	H2 MFC set to  500.000000
1/4/2013	11:36:30 AM	BCl3 MFC set to  0.000000
1/4/2013	11:36:30 AM	PH3 MFC set to  0.000000
1/4/2013	11:36:30 AM	SiCl4 MFC set to  0.000000
1/4/2013	11:36:30 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	11:36:31 AM	Tube furnace set to 0
1/4/2013	11:36:32 AM	Helium valve closed
1/4/2013	11:36:32 AM	BCl3 valve closed
1/4/2013	11:36:32 AM	PH3 valve closed
1/4/2013	11:36:32 AM	SiCl4 pre valve closed
1/4/2013	11:36:32 AM	SiCl4 post valve closed
1/4/2013	11:36:32 AM	Main Vac valve closed
1/4/2013	11:36:32 AM	Bypass valve closed
1/4/2013	11:36:32 AM	H2 valve opened
1/4/2013	11:36:32 AM	Bubbler valve opened
1/4/2013	11:36:32 AM	Helium MFC set to  0.000000
1/4/2013	11:36:32 AM	H2 MFC set to  500.000000
1/4/2013	11:36:32 AM	BCl3 MFC set to  0.000000
1/4/2013	11:36:32 AM	PH3 MFC set to  0.000000
1/4/2013	11:36:32 AM	SiCl4 MFC set to  0.000000
1/4/2013	11:36:32 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	11:36:32 AM	Tube furnace set to 1000
1/4/2013	11:56:32 AM	Helium valve closed
1/4/2013	11:56:32 AM	PH3 valve closed
1/4/2013	11:56:32 AM	Main Vac valve closed
1/4/2013	11:56:32 AM	Bypass valve closed
1/4/2013	11:56:32 AM	H2 valve opened
1/4/2013	11:56:32 AM	BCl3 valve opened
1/4/2013	11:56:32 AM	SiCl4 pre valve opened
1/4/2013	11:56:32 AM	SiCl4 post valve opened
1/4/2013	11:56:32 AM	Bubbler valve opened
1/4/2013	11:56:32 AM	Helium MFC set to  0.000000
1/4/2013	11:56:32 AM	H2 MFC set to  450.000000
1/4/2013	11:56:32 AM	BCl3 MFC set to  1.000000
1/4/2013	11:56:32 AM	PH3 MFC set to  0.000000
1/4/2013	11:56:32 AM	SiCl4 MFC set to  50.000000
1/4/2013	11:56:32 AM	Bypass solenoid MFC set to  0.000000
1/4/2013	11:56:32 AM	Tube furnace set to 1000
1/4/2013	12:16:32 PM	Helium valve closed
1/4/2013	12:16:32 PM	BCl3 valve closed
1/4/2013	12:16:32 PM	Main Vac valve closed
1/4/2013	12:16:32 PM	Bypass valve closed
1/4/2013	12:16:32 PM	H2 valve opened
1/4/2013	12:16:32 PM	PH3 valve opened
1/4/2013	12:16:32 PM	SiCl4 pre valve opened
1/4/2013	12:16:32 PM	SiCl4 post valve opened
1/4/2013	12:16:32 PM	Bubbler valve opened
1/4/2013	12:16:32 PM	Helium MFC set to  0.000000
1/4/2013	12:16:32 PM	H2 MFC set to  450.000000
1/4/2013	12:16:32 PM	BCl3 MFC set to  0.000000
1/4/2013	12:16:32 PM	PH3 MFC set to  20.000000
1/4/2013	12:16:32 PM	SiCl4 MFC set to  50.000000
1/4/2013	12:16:32 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:16:32 PM	Tube furnace set to 1000
1/4/2013	12:21:32 PM	Helium valve closed
1/4/2013	12:21:32 PM	BCl3 valve closed
1/4/2013	12:21:32 PM	PH3 valve closed
1/4/2013	12:21:32 PM	SiCl4 pre valve closed
1/4/2013	12:21:32 PM	SiCl4 post valve closed
1/4/2013	12:21:32 PM	Main Vac valve closed
1/4/2013	12:21:32 PM	Bypass valve closed
1/4/2013	12:21:32 PM	H2 valve opened
1/4/2013	12:21:32 PM	Bubbler valve opened
1/4/2013	12:21:32 PM	Helium MFC set to  0.000000
1/4/2013	12:21:32 PM	H2 MFC set to  500.000000
1/4/2013	12:21:32 PM	BCl3 MFC set to  0.000000
1/4/2013	12:21:32 PM	PH3 MFC set to  0.000000
1/4/2013	12:21:32 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:21:32 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:21:32 PM	Tube furnace set to 950
1/4/2013	12:24:32 PM	Helium valve closed
1/4/2013	12:24:32 PM	BCl3 valve closed
1/4/2013	12:24:32 PM	PH3 valve closed
1/4/2013	12:24:32 PM	SiCl4 pre valve closed
1/4/2013	12:24:32 PM	SiCl4 post valve closed
1/4/2013	12:24:32 PM	Main Vac valve closed
1/4/2013	12:24:32 PM	Bypass valve closed
1/4/2013	12:24:32 PM	H2 valve opened
1/4/2013	12:24:32 PM	Bubbler valve opened
1/4/2013	12:24:32 PM	Helium MFC set to  0.000000
1/4/2013	12:24:32 PM	H2 MFC set to  500.000000
1/4/2013	12:24:33 PM	BCl3 MFC set to  0.000000
1/4/2013	12:24:33 PM	PH3 MFC set to  0.000000
1/4/2013	12:24:33 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:24:33 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:24:33 PM	Tube furnace set to 900
1/4/2013	12:27:33 PM	Helium valve closed
1/4/2013	12:27:33 PM	BCl3 valve closed
1/4/2013	12:27:33 PM	PH3 valve closed
1/4/2013	12:27:33 PM	SiCl4 pre valve closed
1/4/2013	12:27:33 PM	SiCl4 post valve closed
1/4/2013	12:27:33 PM	Main Vac valve closed
1/4/2013	12:27:33 PM	Bypass valve closed
1/4/2013	12:27:33 PM	H2 valve opened
1/4/2013	12:27:33 PM	Bubbler valve opened
1/4/2013	12:27:33 PM	Helium MFC set to  0.000000
1/4/2013	12:27:33 PM	H2 MFC set to  500.000000
1/4/2013	12:27:33 PM	BCl3 MFC set to  0.000000
1/4/2013	12:27:33 PM	PH3 MFC set to  0.000000
1/4/2013	12:27:33 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:27:33 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:27:33 PM	Tube furnace set to 850
1/4/2013	12:30:33 PM	Helium valve closed
1/4/2013	12:30:33 PM	BCl3 valve closed
1/4/2013	12:30:33 PM	PH3 valve closed
1/4/2013	12:30:33 PM	SiCl4 pre valve closed
1/4/2013	12:30:33 PM	SiCl4 post valve closed
1/4/2013	12:30:33 PM	Main Vac valve closed
1/4/2013	12:30:33 PM	Bypass valve closed
1/4/2013	12:30:33 PM	H2 valve opened
1/4/2013	12:30:33 PM	Bubbler valve opened
1/4/2013	12:30:33 PM	Helium MFC set to  0.000000
1/4/2013	12:30:33 PM	H2 MFC set to  500.000000
1/4/2013	12:30:33 PM	BCl3 MFC set to  0.000000
1/4/2013	12:30:33 PM	PH3 MFC set to  0.000000
1/4/2013	12:30:33 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:30:33 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:30:33 PM	Tube furnace set to 800
1/4/2013	12:33:33 PM	Helium valve closed
1/4/2013	12:33:33 PM	BCl3 valve closed
1/4/2013	12:33:33 PM	PH3 valve closed
1/4/2013	12:33:33 PM	SiCl4 pre valve closed
1/4/2013	12:33:33 PM	SiCl4 post valve closed
1/4/2013	12:33:33 PM	Main Vac valve closed
1/4/2013	12:33:33 PM	Bypass valve closed
1/4/2013	12:33:33 PM	H2 valve opened
1/4/2013	12:33:33 PM	Bubbler valve opened
1/4/2013	12:33:33 PM	Helium MFC set to  0.000000
1/4/2013	12:33:33 PM	H2 MFC set to  500.000000
1/4/2013	12:33:33 PM	BCl3 MFC set to  0.000000
1/4/2013	12:33:33 PM	PH3 MFC set to  0.000000
1/4/2013	12:33:33 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:33:33 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:33:33 PM	Tube furnace set to 750
1/4/2013	12:36:33 PM	H2 valve closed
1/4/2013	12:36:33 PM	BCl3 valve closed
1/4/2013	12:36:33 PM	PH3 valve closed
1/4/2013	12:36:33 PM	SiCl4 pre valve closed
1/4/2013	12:36:33 PM	SiCl4 post valve closed
1/4/2013	12:36:33 PM	Main Vac valve closed
1/4/2013	12:36:33 PM	Bypass valve closed
1/4/2013	12:36:33 PM	Helium valve opened
1/4/2013	12:36:33 PM	Bubbler valve opened
1/4/2013	12:36:33 PM	Helium MFC set to  500.000000
1/4/2013	12:36:33 PM	H2 MFC set to  0.000000
1/4/2013	12:36:33 PM	BCl3 MFC set to  0.000000
1/4/2013	12:36:33 PM	PH3 MFC set to  0.000000
1/4/2013	12:36:33 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:36:33 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:36:34 PM	Tube furnace set to 0
1/4/2013	12:56:34 PM	Helium valve closed
1/4/2013	12:56:34 PM	H2 valve closed
1/4/2013	12:56:34 PM	BCl3 valve closed
1/4/2013	12:56:34 PM	PH3 valve closed
1/4/2013	12:56:34 PM	SiCl4 pre valve closed
1/4/2013	12:56:34 PM	SiCl4 post valve closed
1/4/2013	12:56:34 PM	Main Vac valve closed
1/4/2013	12:56:34 PM	Bypass valve closed
1/4/2013	12:56:34 PM	Bubbler valve closed
1/4/2013	12:56:34 PM	Helium MFC set to  0.000000
1/4/2013	12:56:34 PM	H2 MFC set to  0.000000
1/4/2013	12:56:34 PM	BCl3 MFC set to  0.000000
1/4/2013	12:56:34 PM	PH3 MFC set to  0.000000
1/4/2013	12:56:34 PM	SiCl4 MFC set to  0.000000
1/4/2013	12:56:34 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	12:56:34 PM	Tube furnace set to 0
1/4/2013	1:26:34 PM	Helium valve closed
1/4/2013	1:26:34 PM	H2 valve closed
1/4/2013	1:26:34 PM	BCl3 valve closed
1/4/2013	1:26:34 PM	PH3 valve closed
1/4/2013	1:26:34 PM	SiCl4 pre valve closed
1/4/2013	1:26:34 PM	SiCl4 post valve closed
1/4/2013	1:26:34 PM	Main Vac valve closed
1/4/2013	1:26:34 PM	Bubbler valve closed
1/4/2013	1:26:34 PM	Bypass valve opened
1/4/2013	1:26:34 PM	Helium MFC set to  0.000000
1/4/2013	1:26:34 PM	H2 MFC set to  0.000000
1/4/2013	1:26:34 PM	BCl3 MFC set to  0.000000
1/4/2013	1:26:34 PM	PH3 MFC set to  0.000000
1/4/2013	1:26:34 PM	SiCl4 MFC set to  0.000000
1/4/2013	1:26:34 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	1:26:34 PM	Tube furnace set to 0
1/4/2013	1:27:34 PM	Helium valve closed
1/4/2013	1:27:34 PM	H2 valve closed
1/4/2013	1:27:34 PM	BCl3 valve closed
1/4/2013	1:27:34 PM	PH3 valve closed
1/4/2013	1:27:34 PM	SiCl4 pre valve closed
1/4/2013	1:27:34 PM	SiCl4 post valve closed
1/4/2013	1:27:34 PM	Main Vac valve closed
1/4/2013	1:27:34 PM	Bubbler valve closed
1/4/2013	1:27:34 PM	Bypass valve opened
1/4/2013	1:27:34 PM	Helium MFC set to  0.000000
1/4/2013	1:27:34 PM	H2 MFC set to  0.000000
1/4/2013	1:27:34 PM	BCl3 MFC set to  0.000000
1/4/2013	1:27:34 PM	PH3 MFC set to  0.000000
1/4/2013	1:27:34 PM	SiCl4 MFC set to  0.000000
1/4/2013	1:27:34 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	1:27:34 PM	Tube furnace set to 0
1/4/2013	1:28:34 PM	Helium valve closed
1/4/2013	1:28:34 PM	H2 valve closed
1/4/2013	1:28:34 PM	BCl3 valve closed
1/4/2013	1:28:34 PM	PH3 valve closed
1/4/2013	1:28:34 PM	SiCl4 pre valve closed
1/4/2013	1:28:34 PM	SiCl4 post valve closed
1/4/2013	1:28:34 PM	Bypass valve closed
1/4/2013	1:28:34 PM	Bubbler valve closed
1/4/2013	1:28:34 PM	Main Vac valve opened
1/4/2013	1:28:34 PM	Helium MFC set to  0.000000
1/4/2013	1:28:34 PM	H2 MFC set to  0.000000
1/4/2013	1:28:34 PM	BCl3 MFC set to  0.000000
1/4/2013	1:28:35 PM	PH3 MFC set to  0.000000
1/4/2013	1:28:35 PM	SiCl4 MFC set to  0.000000
1/4/2013	1:28:35 PM	Bypass solenoid MFC set to  0.000000
1/4/2013	1:28:35 PM	Tube furnace set to 0
1/4/2013	1:28:36 PM	Run finished at 1:28 PM
